Journal of Physical Studies 12(4), Article 4002 [5 pages] (2008)
DOI: https://doi.org/10.30970/jps.12.4002 INVESTIGATION OF MAGNETIC, MICROMECHANICAL AND STRUCTURAL CHANGES IN SILICON CRYSTALS WITH ISOVALENT IMPURITIES AFTER THEIR THERMAL TREATMENT IN THE RANGE OF 700–1100°CV. M. Tsmots{1}, P. G. Litovchenko{2}, Yu. V. Pavlovskyy{1, 2}, V. V. Voytovych{3}, M. M. Luchkevych{1, 2}
1Solid State Microelectronics Laboratory of the
National Academy of Sciences of Ukraine, |
Some changes of magnetic and micromechanical characteristics of CZ-Si crystals doped by carbon and lead after their thermal treatment in the range of 700-1100°C have been investigated. The distribution of defects formed at different annealing temperatures has been analyzed. The models for explanation of the results obtained have been proposed. A correlation between changes of magnetic susceptibility, microhardness and transformation of structural defects in crystals after their thermal treatment has been established.
PACS number(s): 07.85.Nc, 61.72.Dd