Journal of Physical Studies 26(4), Article 4601 [5 pages] (2022)
DOI: https://doi.org/10.30970/jps.26.4601 FEATURES OF GROWING Si- AND Si1-xGex-SINGLE-CRYSTAL FILMS FROM SOLUTION-MELT BASED ON TINA. Sh. Razzokov{1} , A. S. Saidov{2} , V. V. Girzhon{3} , O. V. Smolyakov{3}
{1}Urgench State University, 14, Kh. Alimdjan St., Urgench, 220100, Uzbekistan,
|
The features of variband single-crystal structures based on Si$_{1-x}$Ge$_{x}$ $(0<x<1)$, which have been grown on Si(111) substrates from a tin solution-melt by liquid-phase epitaxy have been experimentally investigated and analyzed. A mechanism for the growth of such structures is proposed, and the reason for the greater thickness of the deposited films on the upper substrates for liquid-phase epitaxy is explained based on the Rayleigh-Taylor instability phenomenon. Optimal technological regimes for obtaining epitaxial layers and structures are predicted.
Key words: epitaxy, solution-melt, substrate, Rayleigh–Taylor instability, Brownian motion, diffusion.