Journal of Physical Studies 27(3), Article 3001 [6 pages] (2023) DOI: https://doi.org/10.30970/jps.27.3001 THE EFFECT OF UV LIGHT IRRADIATION ON THE GAS-SENSING PROPERTIES OF THE QUARTZ CRYSTAL MICROBALANCE SENSOR COMBINED WITH ZnO FILM B. Turko1 , V. Vasil'yev1, V. Kapustianyk1 , O. Zakrevskyi1, L. Hrytsak1 , A. Kostruba2  1Ivan Franko National University of Lviv, 50, Drahomanov St., Lviv, 79005, Ukraine, 2Stepan Gzhytskyi National University of Veterinary Medicine and Biotechnologies, 50, Pekarska St., Lviv, 79010, Ukraine, e-mail: tyrko_borys@ukr.net Received 07 February 2023; in final form 24 April 2023; accepted 01 June 2023; published online 25 September 2023

Zinc oxide thin films were deposited on the both electrodes of the commercial quartz resonator HC49U using the standard radio-frequency magnetron sputtering method in order to provide NH$_{3}$, H$_{2}$O$_{2}$ and C$_{2}$H$_{5}$OH vapor sensors application at room temperature. For the first time, the impact of the ultraviolet light-emitting diode illumination ($λ_{\rm max} = 395$ nm, light irradiance of about 2 \text{mW/cm$^2$}) on the main characteristics of the ZnO coated quartz crystal microbalance sensor, such as response/recovery time and sensitivity, was studied. The obtained experimental data and calculated characteristics prove that ultraviolet illumination of the quartz crystal microbalance sensor covered with a ZnO film leads to a significant reduction in the recovery time at detection of ethanol, ammonia or hydrogen peroxide vapors. Under the influence of ultraviolet irradiation, the fabricated quartz crystal microbalance sensor coated with ZnO film showed promising potential in detecting explosive components.

Key words: UV LED irradiation, zinc oxide, gas sensor, thin film, quartz crystal microbalance.

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