Journal of Physical Studies 17(2), Article 2601 [6 pages] (2013) DOI: https://doi.org/10.30970/jps.17.2601 DIFFUSION-DEFORMATION THEORY OF THE FORMATION OF SELF-ASSEMBLED NANOCLUSTERS OF THE IMPLANTED IMPURITIES R. M. Peleshchak, O. V. Kuzyk, O. O. Dan'kiv van Franko Drohobych State Pedagogical University, 24, Ivan Franko St., Drohobych, Lviv Region, UA-82100, Ukraine e-mail: peleshchak@rambler.ru

The non-linear diffusion-deformation theory of the self-organization of nanoclusters of the implanted impurities which considers elastic interaction of the implanted impurities among themselves and with the atoms of a matrix is developed. Within this theory criteria of the formation of nanoclusters of the implanted impurities are established. The characteristic length of interaction of the implanted impurities with the atoms of a matrix and the size of a nanocluster depending on an average impurity concentration are defined.

PACS number(s): 61.46.-w, 66.30.Pa

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